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Shock and Vibration
Volume 2015 (2015), Article ID 867171, 15 pages
http://dx.doi.org/10.1155/2015/867171
Research Article

Dynamic Characteristics of Electrostatically Actuated Shape Optimized Variable Geometry Microbeam

State Key Laboratory of Mechanical System and Vibration, School of Mechanical Engineering, Shanghai Jiao Tong University, 800 Dongchuan Road, Shanghai 200240, China

Received 23 September 2014; Revised 8 January 2015; Accepted 3 February 2015

Academic Editor: Dumitru I. Caruntu

Copyright © 2015 Sha Zhang et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

Linked References

  1. L. Zhang, T. Yu, and Y. Zhao, “Numerical analysis of theoretical model of the RF MEMS switches,” Acta Mechanica Sinica, vol. 20, no. 2, pp. 178–184, 2004. View at Publisher · View at Google Scholar · View at Scopus
  2. M. Mojahedi, M. T. Ahmadian, and K. Firoozbakhsh, “The oscillatory behavior, static and dynamic analyses of a micro/nano gyroscope considering geometric nonlinearities and intermolecular forces,” Acta Mechanica Sinica, vol. 29, no. 6, pp. 851–863, 2013. View at Publisher · View at Google Scholar · View at Scopus
  3. Y. C. Hu, C. M. Chang, and S. C. Huang, “Some design considerations on the electrostatically actuated microstructures,” Sensors and Actuators A: Physical, vol. 112, no. 1, pp. 155–161, 2004. View at Publisher · View at Google Scholar · View at Scopus
  4. P. M. Osterberg and S. D. Senturia, “M-test: a test chip for MEMS material property measurement using electrostatically actuated test structures,” Journal of Microelectromechanical Systems, vol. 6, no. 2, pp. 107–118, 1997. View at Publisher · View at Google Scholar · View at Scopus
  5. W.-M. Zhang, H. Yan, Z.-K. Peng, and G. Meng, “Electrostatic pull-in instability in mems/nems: a review,” Sensors and Actuators A: Physical, vol. 214, pp. 187–218, 2014. View at Publisher · View at Google Scholar · View at Scopus
  6. J.-M. Huang, K. M. Liew, C. H. Wong, S. Rajendran, M. J. Tan, and A. Q. Liu, “Mechanical design and optimization of capacitive micromachined switch,” Sensors and Actuators A: Physical, vol. 93, no. 3, pp. 273–285, 2001. View at Publisher · View at Google Scholar · View at Scopus
  7. O. Sigmund, “Design of multiphysics actuators using topology optimization—part I: one-material structures,” Computer Methods in Applied Mechanics and Engineering, vol. 190, no. 49-50, pp. 6577–6604, 2001. View at Publisher · View at Google Scholar · View at Scopus
  8. M. Raulli and K. Maute, “Topology optimization of electrostatically actuated microsystems,” Structural and Multidisciplinary Optimization, vol. 30, no. 5, pp. 342–359, 2005. View at Publisher · View at Google Scholar · View at Scopus
  9. E. Lemaire, P. Duysinx, V. Rochus, and J.-C. Golinval, “Topology optimization of electromechanical microsystems against pull-in voltage,” in Proceedings of the 7th International Conference on Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics and Micro-Systems (EuroSime '06), pp. 1–8, IEEE, April 2006. View at Publisher · View at Google Scholar · View at Scopus
  10. M. M. Abdalla, C. K. Reddy, W. F. Faris, and Z. Gürdal, “Optimal design of an electrostatically actuated microbeam for maximum pull-in voltage,” Computers & Structures, vol. 83, no. 15-16, pp. 1320–1329, 2005. View at Publisher · View at Google Scholar · View at Scopus
  11. F. Najar, S. Choura, S. El-Borgi, E. M. Abdel-Rahman, and A. H. Nayfeh, “Modeling and design of variable-geometry electrostatic microactuators,” Journal of Micromechanics and Microengineering, vol. 15, no. 3, pp. 419–429, 2005. View at Publisher · View at Google Scholar · View at Scopus
  12. F. Najar, S. Choura, E. M. Abdel-Rahman, S. El-Borgi, and A. Nayfeh, “Dynamic analysis of variable-geometry electrostatic microactuators,” Journal of Micromechanics and Microengineering, vol. 16, no. 11, pp. 2449–2457, 2006. View at Publisher · View at Google Scholar · View at Scopus
  13. M. M. Joglekar and D. N. Pawaskar, “Shape optimization of electrostatically actuated microbeams for extending static and dynamic operating ranges,” Structural and Multidisciplinary Optimization, vol. 46, no. 6, pp. 871–890, 2012. View at Publisher · View at Google Scholar · View at Scopus
  14. A. L. Herrera-May, L. A. Aguilera-Cortés, P. J. García-Ramírez, H. Plascencia-Mora, and M. Torres-Cisneros, “Modeling of the intrinsic stress effect on the resonant frequency of NEMS resonators integrated by beams with variable cross-section,” Microsystem Technologies, vol. 16, no. 12, pp. 2067–2074, 2010. View at Publisher · View at Google Scholar · View at Scopus
  15. A. L. Herrera-May, P. J. García-Ramírez, L. A. Aguilera-Cortés et al., “Analytical modeling for the bending resonant frequency of sensors based on micro and nanoresonators with complex structural geometry,” IEEE Sensors Journal, vol. 11, no. 6, pp. 1361–1374, 2011. View at Publisher · View at Google Scholar · View at Scopus
  16. A. L. Herrera-May, L. A. Aguilera-Cortés, H. Plascencia-Mora, Á. L. Rodríguez-Morales, and J. Lu, “Analytical modeling for the bending resonant frequency of multilayered microresonators with variable cross-section,” Sensors, vol. 11, no. 9, pp. 8203–8226, 2011. View at Publisher · View at Google Scholar · View at Scopus
  17. H. Sadeghian, G. Rezazadeh, and P. M. Osterberg, “Application of the generalized differential quadrature method to the study of pull-in phenomena of MEMS switches,” Journal of Microelectromechanical Systems, vol. 16, no. 6, pp. 1334–1340, 2007. View at Publisher · View at Google Scholar · View at Scopus
  18. S. Tomasiello, “Differential quadrature method: application to initial-boundary-value problems,” Journal of Sound and Vibration, vol. 218, no. 4, pp. 573–585, 1998. View at Publisher · View at Google Scholar · View at Scopus
  19. A. H. Nayfeh, M. I. Younis, and E. M. Abdel-Rahman, “Dynamic pull-in phenomenon in MEMS resonators,” Nonlinear Dynamics, vol. 48, no. 1-2, pp. 153–163, 2007. View at Publisher · View at Google Scholar · View at Scopus
  20. M. I. Younis, E. M. Abdel-Rahman, and A. Nayfeh, “A reduced-order model for electrically actuated microbeam-based MEMS,” Journal of Microelectromechanical Systems, vol. 12, no. 5, pp. 672–680, 2003. View at Publisher · View at Google Scholar · View at Scopus
  21. M. I. Younis, Mems Linear and Nonlinear Statics and Dynamics, vol. 20, Springer Science & Business Media, 2011.
  22. M. I. Younis and A. H. Nayfeh, “A study of the nonlinear response of a resonant microbeam to an electric actuation,” Nonlinear Dynamics, vol. 31, no. 1, pp. 91–117, 2003. View at Publisher · View at Google Scholar · View at Scopus
  23. M. M. Joglekar and D. N. Pawaskar, “In pull-in dynamics of variable-width electrostatic microactuators,” in Proceedings of the ASME 9th Biennial Conference on Engineering Systems Design and Analysis, pp. 327–335, American Society of Mechanical Engineers, 2008.
  24. A. H. Nayfeh and M. I. Younis, “Dynamics of MEMS resonators under superharmonic and subharmonic excitations,” Journal of Micromechanics and Microengineering, vol. 15, no. 10, pp. 1840–1847, 2005. View at Publisher · View at Google Scholar · View at Scopus
  25. M. Bao and H. Yang, “Squeeze film air damping in MEMS,” Sensors and Actuators, A: Physical, vol. 136, no. 1, pp. 3–27, 2007. View at Publisher · View at Google Scholar · View at Scopus
  26. W.-C. Chuang, C.-W. Wang, W.-C. Chu, P.-Z. Chang, and Y.-C. Hu, “The fringe capacitance formula of microstructures,” Journal of Micromechanics and Microengineering, vol. 22, no. 2, Article ID 025015, 2012. View at Publisher · View at Google Scholar · View at Scopus
  27. M. Vagia and A. Tzes, “A literature review on modeling and control design for electrostatic microactuators with fringing and squeezed film damping effects,” in Proceedings of the American Control Conference (ACC '10), pp. 3390–3402, IEEE, July 2010. View at Scopus
  28. H. Yang, Microgyroscope and microdynamics [Ph. D. dissertation], 2000.
  29. H. B. Palmer, “The capacitance of a parallel-plate capacitor by the Schwartz-Christoffel transformation,” Electrical Engineering, vol. 56, no. 3, pp. 363–368, 1937. View at Publisher · View at Google Scholar
  30. N. P. van der Meijs and J. T. Fokkema, “VLSI circuit reconstruction from mask topology,” Integration, the VLSI Journal, vol. 2, no. 2, pp. 85–119, 1984. View at Publisher · View at Google Scholar · View at Scopus
  31. R. C. Batra, M. Porfiri, and D. Spinello, “Vibrations of narrow microbeams predeformed by an electric field,” Journal of Sound and Vibration, vol. 309, no. 3–5, pp. 600–612, 2008. View at Publisher · View at Google Scholar · View at Scopus
  32. V. Leus and D. Elata, “Fringing field effect in electrostatic actuators,” Tech. Rep. ETR-2004-2, Technion-Israel Institute of Technology, 2004. View at Google Scholar