Dynamic Characteristics of Electrostatically Actuated Shape Optimized Variable Geometry Microbeam

Table 3

Optimized parameters of dynamic mode of actuation of fixed-fixed microbeam [13].

Case
D1	1.333	0.003	0.452	0.394
D2	2.000	0.001	1.317	0.393
D3	2.667	0.001	1.993	0.434
D4	1.333	0.001	0.763	0.233
D5	2.000	0.001	1.813	0.292
D6	2.146	0.001	2.024	0.302
D7	1.333	0.014	0.656	0.282
D8	1.872	0.001	2.156	0.223
D9	1.872	0.001	2.156	0.223