Table 1: Parameters of MFC and vibrating structure.

ItemTypeSize (mm)Max strainFirst modeSecond mode

MFCM281428 × 14 × 0.31550 ppm0.61 nF
Beam45# steel 370 × 20 × 1.398.42 Hz52.76 Hz
MFC-beam 8.30 Hz51.99 Hz