Effects of the van der Waals Force on the Dynamics Performance for a Micro Resonant Pressure Sensor

Table 1

Parameters of the micro film.

a	b	h		v	E	ρ
(mm)	(mm)	(μm)	(C^2⋅N^−1⋅m^−2)	(μm)	(GPa)	(kg/m^3)
2	1	5	8.85 × 10^−12	0.5	190	2330