Research Article

Effects of the van der Waals Force on the Dynamics Performance for a Micro Resonant Pressure Sensor

Table 3

Natural frequency of the micro pressure sensor for various initial tension stresses (rad/s).

(%) (%)

 KN/m
Mode 16238.779748.7939.966Mode 195925.07195494.180.220
Mode 120663.99119963.070.581Mode 267851.08267536.050.118
 KN/m
Mode 28163.5124990.4811.27Mode 207730.60207324.240.196
Mode 129142.32128487.670.507Mode 283224.23282926.330.105
 KN/m
Mode 36368.5033970.716.594Mode 218900.35218514.770.176
Mode 137097.33136480.840.450Mode 297804.85297521.540.095