Research Article
Effects of the van der Waals Force on the Dynamics Performance for a Micro Resonant Pressure Sensor
Table 3
Natural frequency of the micro pressure sensor for various initial tension stresses (rad/s).
| | | | (%) | | | | (%) |
| KN/m | Mode | 16238.77 | 9748.79 | 39.966 | Mode | 195925.07 | 195494.18 | 0.220 | Mode | 120663.99 | 119963.07 | 0.581 | Mode | 267851.08 | 267536.05 | 0.118 | KN/m | Mode | 28163.51 | 24990.48 | 11.27 | Mode | 207730.60 | 207324.24 | 0.196 | Mode | 129142.32 | 128487.67 | 0.507 | Mode | 283224.23 | 282926.33 | 0.105 | KN/m | Mode | 36368.50 | 33970.71 | 6.594 | Mode | 218900.35 | 218514.77 | 0.176 | Mode | 137097.33 | 136480.84 | 0.450 | Mode | 297804.85 | 297521.54 | 0.095 |
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