Table 1: Material constants of the piezoelectric microbeam [811].


150 GPa0.337.5 × 103 Kg/m3−4.35 C/m210 μC/m2300

is Young’s modulus, is Poisson’s ratio, is mass density, is piezoelectric constant, is flexoelectric constant, is relative dielectric constant, and the vacuum dielectric constant = 8.85 × 10−12 F/m.