Energy Dissipation Contribution Modeling of Vibratory Behavior for Silicon Micromachined Gyroscope

<div>Quality factor<i> Q</i><sub><i>air</i></sub> versus pressure<i> P</i> at the temperature of 20°C.</div>

Shock and Vibration

Figure 8: Energy Dissipation Contribution Modeling of Vibratory Behavior for Silicon Micromachined Gyroscope 