Energy Dissipation Contribution Modeling of Vibratory Behavior for Silicon Micromachined Gyroscope

Table 1

GEOMETRICAL PARAMETER AND MATERIAL PROPERTIES.

Parameters	Value	units
Length of middle elastic beams	440	μm
Length of boudary elastic beams	420	μm
Width of middle elastic beams	12	μm
Width of boundary elastic beams	8	μm
Area of each anchor	1500 × 1500	μm^2
Area of proof mass	4000 × 4000	μm^2
Area of drive/sense mode mass	4000 × 800	μm^2
Resonance frequency f	4000	Hz
Specific heat, C	700	J/kg/K
Density, ρ	2329	kg/m^3
Thermal conductivity, K	130	W/m/K
Young’s modulus, E	169	GPa
Coefficient of thermal expansion, α	2.6e-6	1/K
Thermal diffusivity	7.97e-5	m^2/s