Multi-DOF Ultrasonic Actuators for Laser Beam Positioning

<div>Results of impedance and phase angle spectra measurement of ring-type transducers: measurement of upper transducer, driving frequency is 69.0 kHz (a); measurement of lower transducer, driving frequency is 67.8 kHz (b).</div>

Shock and Vibration

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Figure 13

Figure 13: Multi-DOF Ultrasonic Actuators for Laser Beam Positioning 