Multi-DOF Ultrasonic Actuators for Laser Beam Positioning

<div>Results of impedance and phase angle spectra measurement of cylinder-type transducers: measurement of upper transducer, driving frequency is 82.1 kHz (a); measurement of lower transducer, driving frequency is 79.5 kHz (b).</div>

Shock and Vibration

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Figure 14

Figure 14: Multi-DOF Ultrasonic Actuators for Laser Beam Positioning 