Research Article
Numerical Exploratory Analysis of Dynamics and Control of an Atomic Force Microscopy in Tapping Mode with Fractional Order
Table 1
Parameters of the AFM-TM model [
13,
16].
| | Description | Value |
| | Length of the cantilever | 449 μm | | Width of the cantilever | 46 μm | | Thickness of the cantilever | 1.7 μm | | Tip radius | 0.15 μm | | Material density | 2,330 kg/m3 | | Young’s modulus | 176 GPa | | Bending stiffness | 0.11 Nm−1 | | Frequency of the 1st mode of the cantilever | 11804 kHz | | Quality factor | 100 | | Hamaker constant (repulsive) | 1.3596 × 10−70 J⋅m6 | | Hamaker constant (attractive) | 1.865 × 10−19 J |
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