Shock and Vibration / 2020 / Article / Tab 1

Research Article

Numerical Exploratory Analysis of Dynamics and Control of an Atomic Force Microscopy in Tapping Mode with Fractional Order

Table 1

Parameters of the AFM-TM model [13, 16].

DescriptionValue

Length of the cantilever449 μm
Width of the cantilever46 μm
Thickness of the cantilever1.7 μm
Tip radius0.15 μm
Material density2,330 kg/m3
Young’s modulus176 GPa
Bending stiffness0.11 Nm−1
Frequency of the 1st mode of the cantilever11804 kHz
Quality factor100
Hamaker constant (repulsive)1.3596 × 10−70 J⋅m6
Hamaker constant (attractive)1.865 × 10−19 J

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