Mechanical Behaviors of Electrostatic Microbeams with Nonideal Supports

<div>The effect of translational stiffness on static features by applying the first five-order symmetry modes. (a) Relationship between maximum displacement and DC voltage under different translational stiffness. (b) Variation trend of the pull-in voltage with translational stiffness.</div>

Shock and Vibration

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Figure 4

Figure 4: Mechanical Behaviors of Electrostatic Microbeams with Nonideal Supports 