Research Article

A Novel Method to Reduce the Laser Drilling Time for Hole Cluster considering the Influence of Residual Vibration of the Sample Stage

Table 1

Abbreviation description.

AbbreviationAbbreviation meaning

STThe sum of the time in the deceleration segment of the trapezoidal moving profile and the time when residual vibration decays below the amplitude threshold
ARMAAutoregressive moving average
STDSparse time domain
ASAcceleration signal
FVSFree vibration signal/residual vibration signal
FVSFFree vibration signal filtering
PSDSelf-power spectrum
AFSSignal after low-pass filtering
RVTResidual vibration threshold
AccAcceleration
ECEnvelope curve