Research Article

A Novel Method to Reduce the Laser Drilling Time for Hole Cluster considering the Influence of Residual Vibration of the Sample Stage

Table 3

ARMA recognition results of trapezoidal move profile impact.

Acceleration a (g)Undamped natural frequency (rad/s)Damping ratio ξProportional coefficient λ

244.02910.044420.0048
2.544.86720.042190.0046
344.22010.050310.0049