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The Scientific World Journal
Volume 2013, Article ID 208081, 6 pages
http://dx.doi.org/10.1155/2013/208081
Research Article

Raman Spectra of High-κ Dielectric Layers Investigated with Micro-Raman Spectroscopy Comparison with Silicon Dioxide

1Institute of Electron Technology, Al. Lotników 32/46, 02-668 Warsaw, Poland
2Institute of Physical Chemistry, Polish Academy of Sciences, Kasprzaka 44/52, 01-224 Warsaw, Poland
3Institute of Microelectronics and Optoelectronics, Warsaw University of Technology, Koszykowa 75, 00-662 Warsaw, Poland
4Institute of Physics, Polish Academy of Sciences, Al. Lotników 32/46, 02-668 Warsaw, Poland

Received 30 April 2013; Accepted 31 July 2013

Academic Editors: D. Acevedo, A. G. Magalhães, and A. Tonkikh

Copyright © 2013 P. Borowicz et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

Citations to this Article [5 citations]

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