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The Scientific World Journal
Volume 2013, Article ID 208081, 6 pages
Research Article

Raman Spectra of High-κ Dielectric Layers Investigated with Micro-Raman Spectroscopy Comparison with Silicon Dioxide

1Institute of Electron Technology, Al. Lotników 32/46, 02-668 Warsaw, Poland
2Institute of Physical Chemistry, Polish Academy of Sciences, Kasprzaka 44/52, 01-224 Warsaw, Poland
3Institute of Microelectronics and Optoelectronics, Warsaw University of Technology, Koszykowa 75, 00-662 Warsaw, Poland
4Institute of Physics, Polish Academy of Sciences, Al. Lotników 32/46, 02-668 Warsaw, Poland

Received 30 April 2013; Accepted 31 July 2013

Academic Editors: D. Acevedo, A. G. Magalhães, and A. Tonkikh

Copyright © 2013 P. Borowicz et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

Citations to this Article [5 citations]

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  • Jae-Won Song, Yoon-Ho Nam, Min-Joon Park, Sun-Mi Shin, Ralf B. Wehrspohn, and Jung-Ho Lee, “Hydroxyl functionalization improves the surface passivation of nanostructured silicon solar cells degraded by epitaxial regrowth,” RSC Adv., vol. 5, no. 49, pp. 39177–39181, 2015. View at Publisher · View at Google Scholar
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  • Doğuş Özkan, Hakan Kaleli, and Levent Yüksek, “Quantitative comparison of tribological performance of chromium- and zinc-phosphate-coated piston rings in tribotest rig,” Proceedings of the Institution of Mechanical Engineers, Part J: Journal of Engineering Tribology, vol. 231, no. 1, pp. 75–92, 2017. View at Publisher · View at Google Scholar
  • Kristina Malsagova, Tatyana Pleshakova, Andrey Kozlov, Ivan Shumov, Mikhail Ilnitskii, Andrew Miakonkikh, Vladimir Popov, Konstantin Rudenko, Alexander Glukhov, Igor Kupriyanov, Nina Ivanova, Alexander Rogozhin, Alexander Archakov, and Yuri Ivanov, “Micro-Raman Spectroscopy for Monitoring of Deposition Quality of High-k Stack Protective Layer onto Nanowire FET Chips for Highly Sensitive miRNA Detection,” Biosensors, vol. 8, no. 3, pp. 72, 2018. View at Publisher · View at Google Scholar