Research Article

Formation of Three-Way Scanning Electron Microscope Moiré on Micro/Nanostructures

Figure 8

The three-way SEM moiré patterns on silicon. (a) The moiré spots are not distinct, (b) when the EB pattern is clockwise rotated by 1°, and (c) when the EB pattern is clockwise rotated by 2°.
281954.fig.008a
(a)
281954.fig.008b
(b)
281954.fig.008c
(c)