Research Article

Modeling and Simulation of Linear and Nonlinear MEMS Scale Electromagnetic Energy Harvesters for Random Vibration Environments

Table 1

Parameters of MEMS scale electromagnetic energy harvesters.

Coil typem (kg) (Hz) (Ω) (Ω)Mech. quality factor
Elect. quality factor
Total quality factor G (Tm) (T2m2)References

Wound42.8 × 10−313.1118117.526.53a3.118b1142.52[29]
25 × 10−3843.65329.88a0.3821b[29]
3.8 × 10−394.81.22.7258.7c24.61a0.3322b28.55[30]
0.44 × 10−33509310021611201810.41b36.31[31]
0.028 × 10−39.5 k100164[31]
52.1100200232243119[6]
1.02 × 10−3502323210–606.04[32]
15304.43[32]
0.028 × 10−38.08 k11226[33]
208121.8[34]
106141.3[34]

Planar4.036 × 10−324.810010023.36[19]
0.0304 × 10−31002416.2c403.23a7.94c0.017 b0.005[35]
0.014 × 10−39.837 k55164[33]
0.54 × 10−36011011048.5c2345.33a0.0691b0.232[33]
31391361201.5 × 10−30.0003[27]
221d207d[27]
0.93 × 10−33717.51005.75.83c0.0750.033[17]

Calculated using equation .
bCalculated using equation .
cCalculated using equation .
dDetermined from testing in vacuum.