Research Article
Modeling and Simulation of Linear and Nonlinear MEMS Scale Electromagnetic Energy Harvesters for Random Vibration Environments
Table 1
Parameters of MEMS scale electromagnetic energy harvesters.
| Coil type | m (kg) | (Hz) | (Ω) | (Ω) | Mech. quality factor
| Elect. quality factor
| Total quality factor | G (Tm) | (T2m2) | References |
| Wound | 42.8 × 10−3 | 13.11 | 18 | | 117.52 | 6.53a | | 3.118b | 1142.52 | [29] | 25 × 10−3 | 84 | 3.65 | | | 329.88a | | 0.3821b | | [29] | 3.8 × 10−3 | 94.8 | 1.2 | 2.7 | 258.7c | 24.61a | | 0.3322b | 28.55 | [30] | 0.44 × 10−3 | 350 | 93 | 100 | 216 | 1120 | 181 | 0.41b | 36.31 | [31] | 0.028 × 10−3 | 9.5 k | | 100 | | | 164 | | | [31] | | 52.1 | 100 | 200 | 232 | 243 | 119 | | | [6] | 1.02 × 10−3 | 50 | 2323 | | | 210–60 | | 6.04 | | [32] | | | 1530 | | | | | 4.43 | | [32] | 0.028 × 10−3 | 8.08 k | 112 | | 26 | | | | | [33] | | 208 | | | 121.8 | | | | | [34] | | 106 | | | 141.3 | | | | | [34] |
| Planar | 4.036 × 10−3 | 24.8 | 100 | 100 | 23.36 | | | | | [19] | 0.0304 × 10−3 | 100 | 2 | 4 | 16.2c | 403.23a | 7.94c | 0.017 b | 0.005 | [35] | 0.014 × 10−3 | 9.837 k | 55 | | 164 | | | | | [33] | 0.54 × 10−3 | 60 | 110 | 110 | 48.5c | 2345.33a | | 0.0691b | 0.232 | [33] | | | 31 | 39 | 136 | | 120 | 1.5 × 10−3 | 0.0003 | [27] | | | | | 221d | | 207d | | | [27] | 0.93 × 10−3 | 371 | 7.5 | 100 | 5.7 | | 5.83c | 0.075 | 0.033 | [17] |
|
|
Calculated using equation .
bCalculated using equation .
cCalculated using equation .
dDetermined from testing in vacuum.
|