Research Article
A Pull-in Based Test Mechanism for Device Diagnostic and Process Characterization
Table 3
Estimated α, β, and
values and simulated pull-in voltages and resonance frequency.
| Device | α | β | |
| 1 | 253 nm | 60 nm | 142.8 GPa | 2 | 257 nm | 38 nm | 148 GPa | 3 | 255 nm | 35 nm | 145.2 GPa |
| Device | | | | |
| 1 | 3.665 V | 3.934 V | 4.482 V | 2700 Hz | 2 | 3.782 V | 3.956 V | 4.693 V | 2735 Hz | 3 | 3.750 V | 3.910 V | 4.665 V | 2716 Hz |
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