Research Article

A Pull-in Based Test Mechanism for Device Diagnostic and Process Characterization

Table 3

Estimated α, β, and 𝐸 values and simulated pull-in voltages and resonance frequency.

Device αβ 𝐸

1253 nm60 nm142.8 GPa
2257 nm38 nm148 GPa
3255 nm35 nm145.2 GPa

Device 𝑉 p r 𝑉 p l 𝑉 𝑠 𝑓 0

13.665 V3.934 V4.482 V2700 Hz
23.782 V3.956 V4.693 V2735 Hz
33.750 V3.910 V4.665 V2716 Hz