Advancement in Nanoscale CMOS Device Design En Route to Ultra-Low-Power Applications

<table>The superior short-channel effect obtained with the superhalo compared with a nonhalo retrograde profile [<a href="/journals/vlsi/2011/178516/#B7">8</a>].</table>

VLSI Design

fig20

Figure 20

Figure 20: Advancement in Nanoscale CMOS Device Design En Route to Ultra-Low-Power Applications 