X-Ray Optics and Instrumentation / 2008 / Article / Fig 1

Research Article

Collimated Magnetron Sputter Deposition for Mirror Coatings

Figure 1

(a) The sputtering chamber seen from above. (b) A top-view sketch of the coating geometry. In the horizontal plane the opening angle of each target is limited by a chimney to approximately .
792540.fig.001a
(a)
792540.fig.001b
(b)