Collimated Magnetron Sputter Deposition for Mirror Coatings
The angular distribution of particles ejected from a point on the
target (1). The insets show two different top views of the target during
sputtering. The length of the vector with the direction specified by is a measure of the amount of material ejected
in that direction. In both cases shown, the intensity of ejected particles is
strongest in the forward direction toward the substrate and decreases with
increasing angle .
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