401854.fig.006a
(a)
401854.fig.006b
(b)
Figure 6: (a) The local diffraction intensity of the zeroth, negative first, second, and third orders of a wedged MLL with 1 nm outmost zone width. The dashed line is calculated by (4) and is for the negative first order. (b) The focus profile shows a diffraction-limited size of 0.86 nm. The inset on top is the isophote pattern near the focus (in logarithmic scale).