Fabrication and Performance Test of Fresnel Zone Plate with 35 nm Outermost Zone Width in Hard X-Ray Region

<table>Experimental setup for X-ray nanofocusing at the beamline 20XU of SPring-8. FZP: Fresnel zone plate. OSA: order selecting aperture, a pinhole with 20 <math id="M37" xmlns="http://www.w3.org/1998/Math/MathML"><mrow><mi>μ</mi></mrow></math>m-diameter made of 0.3 mm-thick platinum plate. Beam Stop: direct beam stop for dark-field edge-scan, tantalum 3 mm-thick plate.</table>

X-Ray Optics and Instrumentation

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Figure 3

Figure 3: Fabrication and Performance Test of Fresnel Zone Plate with 35 nm Outermost Zone Width in Hard X-Ray Region 