An Analytical Theory of Piezoresistive Effects in Hall Plates with Large Contacts

Figure 20

Output voltage over supply voltage of a Hall plate from Figure 19 with two squares input resistance and point-sized output contacts as obtained by a finite element simulation with COMSOL MULTIPHYSICS. The strong anisotropy of the conductivity tensor is obtained by large stress in low n-doped silicon. The curves match with respective curves 1 (for ) in Figure 3 of [47]. The slopes of the curves in the weak field limit agree with the analytical theory of the present work (see Table 3).