Research Article

An Analytical Theory of Piezoresistive Effects in Hall Plates with Large Contacts

Table 3

Comparison of between this work and [47]. The reference data of [47] were obtained by the FEM simulation from Figure 20: it is the slopes of the curves in the origin inserted into (33) and solved for . In the FEM simulation the parameters of the Hall plate from Figure 19 were and . The difference between both is small and it seems to come from the nonlinearity of the curves (compare first and last lines).



([47])

(this work)
difference

4411.760.2520.011.35043490.675217450.67531489−144 ppm
0110.010.46501870.930037400.93006014−24.5 ppm
−4411.7640.50.010.12462120.996969600.99697235−2.76 ppm
4411.760.2520.00011.35063000.675315000.675314890.159 ppm