Characterization of Metal Oxide-Based Gas Nanosensors and Microsensors Fabricated via Local Anodic Oxidation Using Atomic Force Microscopy
Figure 2
Images of high-resolution electron microscopy and related techniques of the titanium oxide line sensor active region. (a) SEM image of four Ti oxide lines. (b) SEM image of the same region as in Figure 2(a) after Pt deposition of the protective layer on the top of three lines. (c) HAADAF image in STEM mode of the lamella showing a cross-section of the titanium oxide line. (d) HAADAF high-resolution image of the bottom metallic-oxide interface. (e) TEM image of the same region showed in Figure 2(d). (g) High-resolution TEM image of the same region showed in Figure 2(d). (f) FFT image of the Ti in the most lower part of Figure 2(f). (h) FFT image of the Ti oxide in the upper part of Figure 2(f). (i) HRTEM image showing the titanium oxide nanocrystals after applying a bypass filter in FFT of the four spots circled in Figure 2(h).
