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ElectroComponent Science and Technology
Volume 3 (1977), Issue 4, Pages 225-231
http://dx.doi.org/10.1155/APEC.3.225

Electrolytic Oxidation of Semiconductor Surfaces

Department of Electrical and Electronic Engineering, University of Newcastle upon Tyne, NE1 7RU, UK

Received 23 December 1976

Copyright © 1977 Hindawi Publishing Corporation. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

Abstract

Recently a greater understanding of the physics and chemistry of anodic oxide growth on III-V compound semiconductors has become available. These details are reviewed and critically assessed. With the data avilable now new device applications can be considered.