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ElectroComponent Science and Technology
Volume 3 (1977), Issue 4, Pages 225-231

Electrolytic Oxidation of Semiconductor Surfaces

Department of Electrical and Electronic Engineering, University of Newcastle upon Tyne, NE1 7RU, UK

Received 23 December 1976

Copyright © 1977 Hindawi Publishing Corporation.


Recently a greater understanding of the physics and chemistry of anodic oxide growth on III-V compound semiconductors has become available. These details are reviewed and critically assessed. With the data avilable now new device applications can be considered.