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ElectroComponent Science and Technology
Volume 4 (1977), Issue 2, Pages 85-88
http://dx.doi.org/10.1155/APEC.4.85

Techniques for the Examination of Thick Film Resistor Microstructures by T.E.M.

Plessey Company Limited, Northants, Caswell, UK

Received 30 May 1977

Copyright © 1977 Hindawi Publishing Corporation. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

Abstract

This paper discusses the preparation techniques which can be used for the examination of thick film resistor microstructures by Transmission Electron Microscopy. The application of this technique, including High Voltage Electron Microscopy and Electron Microscope Mass Analysis, to both Ruthenium Dioxide and Bismuth Ruthenate based thick film resistors, is considered.