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ElectroComponent Science and Technology
Volume 6 (1980), Issue 3-4, Pages 209-214
http://dx.doi.org/10.1155/APEC.6.209

Materials and Applications for Thin Films in Hybrid Microelectronics

Balzers AG, Thin Film Electronics Dept., Balzers FL-9496, Liechtenstein

Received 28 June 1979

Copyright © 1980 Hindawi Publishing Corporation. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

Abstract

The use of thick films in microelectronics has increased in an impressive way during the last years. In contrast to this, thin films have shown a less spectacular but nevertheless steady evolution which concerned mainly more efficient deposition methods (planar magnetron) as well as higher quality films and thus better components and circuits. The present paper aims at illustrating this by some selected examples.