Special IssueThe Second European Hybrid Microelectronics Conference. Part II
View this Special Issue Open AccessS.A.W. Technology for Resonator Structures
F. Sleeckx,1T. Naten,1A. van de Capelle,1and J. Vandewege1,2
The different processing steps of S.A.W. technology are reviewed. Special attention is given to the technology
of the distributed feedback resonator.
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