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ElectroComponent Science and Technology
Volume 8 (1981), Issue 3-4, Pages 235-239
http://dx.doi.org/10.1155/APEC.8.235

Combination of Thick-Film Dielectric/Thin Film Conductor for Fine Pattern Formation of Multi-Layer Substrate

1NEC-Toshiba Information Systems Inc., Sumitomo Mita Bld. 37–8, 5-Chome, Shiba, Minatoku, Tokyo 108, Japan
2Nippon Electric Co., Ltd., 10, 1-Chome Nisshin-cho, Fuchu City, Tokyo 183, Japan

Copyright © 1981 Hindawi Publishing Corporation. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

How to Cite this Article

Takashi Tamura, Akihiro Dohya, and Tatsuo Inoue, “Combination of Thick-Film Dielectric/Thin Film Conductor for Fine Pattern Formation of Multi-Layer Substrate,” ElectroComponent Science and Technology, vol. 8, no. 3-4, pp. 235-239, 1981. doi:10.1155/APEC.8.235