Research Article
Multilayer, Stacked Spiral Copper Inductors on Silicon with Micro-Henry Inductance Using Single-Level Lithography
Table 2
Performance metrics for geometry variations (theory, experiment (error)).
| | Design | Nominal inductance (μH) @ 1 MHz | Nominal inductance/footprint area (nH/mm2) @ 1 MHz | Resistance (Ω) @ 1 MHz | (maximum) | SRF (MHz) |
| | 1 | 26.59, 24.74 (7.5%) | 235.1, 218.8 (7.5%) | 120.7, 120.8 (0.1%) | 3.05, 2.26 (35%) | 9.11, 9.87 (7.7%) | | 2 | 19.19, 17.25 (11.2%) | 134.0, 120.5 (11.2%) | 65.6, 66.5 (1.4%) | 1.80, 2.05 (12.2%) | 5.1, 5.72 (10.8%) | | 3 | 26.82, 24.74 (8.5%) | 237.2, 218.8 (8.5%) | 60.4, 59.1 (2.2%) | 4.78, 4.6 (3.9%) | 9.12, 10.58 (13.8%) |
|
|
