Investigation of the Working Parameters of a Single Magnetron of a Multiple Ion Cluster Source: Determination of the Relative Influence of the Parameters on the Size and Density of Nanoparticles

Table 3

Row data from Figure 3 and details of the AFM images and the size distribution data associated with Figure 3 values.

𝜑𝑇 = 60 sccm
𝐿Ag (mm)	𝜑Ag (sccm)	Average NP Size (nm)	NP · 𝜇m^−2 · s^−1	AFM images	Size distribution file
170	5	7.1±1.1	5.2±0.5	Images 1–4	Dataset Item 3
125		5.1±1.2	3.9±0.3	Images 14–19	Dataset Item 6
95		4.4±0.9	3.1±0.1	Images 28–32	Dataset Item 9
170	10	5.2±1.0	4.4±0.3	Images 5–9	Dataset Item 4
125		3.8±0.8	2.4±0.3	Images 20–22	Dataset Item 7
95		2.8±1.2	2.8±0.2	Images 33–37	Dataset Item 10
170	20	3.0±1.0	2.9±0.5	Images 10–13	Dataset Item 5
125		2.6±1.0	2.2±0.2	Images 23–27	Dataset Item 8
95		1.6±0.7	1.5±0.3	Images 38–42	Dataset Item 11