p-Type Quasi-Mono Silicon Solar Cell Fabricated by Ion Implantation

<table class="table-group" id="tab5"><tr><td><table class="table"><tr><td class="thead-hr" colspan="3"><hr/></td></tr><tr class="thead"><td align="left"> </td><td align="center">POCl<sub>3</sub></td><td align="center">Implant</td></tr><tr><td class="thead-hr" colspan="3"><hr/></td></tr><tr><td align="left"><svg height="15.4" id="M59" style="vertical-align:-3.3907pt" version="1.1" viewbox="0 0 20.1625 15.4" width="20.1625" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink">
<g transform="matrix(.017,-0,0,-.017,.062,11.112)"><path d="M627 18l-10 -26q-79 6 -116 27t-69 76q-41 71 -71 138q-13 29 -27.5 39t-42.5 10h-46l-27 -145q-13 -74 -2.5 -88.5t78.5 -20.5l-6 -28h-271l5 28q66 6 82.5 21.5t30.5 87.5l71 387q12 66 2 78.5t-77 19.5l8 28h233q102 0 147 -29q65 -43 65 -129q0 -69 -45.5 -117
t-115.5 -72q40 -86 66 -133q39 -68 65 -101q28 -37 73 -51zM491 483q0 67 -33.5 101t-91.5 34q-35 0 -51 -10q-13 -8 -20 -48l-45 -245h49q71 0 113 28q79 52 79 140z" id="x1D445"></path></g>
<g transform="matrix(.012,-0,0,-.012,11.013,15.187)"><path d="M689 332q0 -81 -40 -161.5t-103.5 -131.5t-127.5 -51q-32 0 -58.5 16t-40.5 46q-70 -62 -139 -62q-45 0 -77.5 30t-32.5 86q0 8 7 52q11 77 45 187q6 19 6 34q0 6 -7 6q-24 0 -78 -64l-20 23q32 48 73 77t78 29q32 0 32 -43q0 -30 -12 -73q-27 -95 -38 -152
q-8 -44 -8 -58q0 -77 68 -77q31 0 60 33.5t39 77.5l62 260l75 16l5 -6l-63 -246q-8 -29 -8 -58q0 -77 68 -77q66 0 116 75.5t50 194.5q0 43 -12 57q-11 12 -11 24q0 19 15 35.5t34 16.5q18 0 30.5 -34.5t12.5 -81.5z" id="x1D464"></path></g>
</svg>%</td><td align="center">5.51%</td><td align="center">4.64%</td></tr><tr class="table-tr"><td colspan="3"><hr class="tbody-hr"/></td></tr></table></td></tr></table>

Comparison of <svg height="15.4" id="M58" style="vertical-align:-3.3907pt" version="1.1" viewbox="0 0 20.1625 15.4" width="20.1625" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink">
<g transform="matrix(.017,-0,0,-.017,.062,11.112)"><path d="M627 18l-10 -26q-79 6 -116 27t-69 76q-41 71 -71 138q-13 29 -27.5 39t-42.5 10h-46l-27 -145q-13 -74 -2.5 -88.5t78.5 -20.5l-6 -28h-271l5 28q66 6 82.5 21.5t30.5 87.5l71 387q12 66 2 78.5t-77 19.5l8 28h233q102 0 147 -29q65 -43 65 -129q0 -69 -45.5 -117
t-115.5 -72q40 -86 66 -133q39 -68 65 -101q28 -37 73 -51zM491 483q0 67 -33.5 101t-91.5 34q-35 0 -51 -10q-13 -8 -20 -48l-45 -245h49q71 0 113 28q79 52 79 140z" id="x1D445"></path></g>
<g transform="matrix(.012,-0,0,-.012,11.013,15.187)"><path d="M689 332q0 -81 -40 -161.5t-103.5 -131.5t-127.5 -51q-32 0 -58.5 16t-40.5 46q-70 -62 -139 -62q-45 0 -77.5 30t-32.5 86q0 8 7 52q11 77 45 187q6 19 6 34q0 6 -7 6q-24 0 -78 -64l-20 23q32 48 73 77t78 29q32 0 32 -43q0 -30 -12 -73q-27 -95 -38 -152
q-8 -44 -8 -58q0 -77 68 -77q31 0 60 33.5t39 77.5l62 260l75 16l5 -6l-63 -246q-8 -29 -8 -58q0 -77 68 -77q66 0 116 75.5t50 194.5q0 43 -12 57q-11 12 -11 24q0 19 15 35.5t34 16.5q18 0 30.5 -34.5t12.5 -81.5z" id="x1D464"></path></g>
</svg>% between POCl<sub>3</sub> diffusion and implantation after ARC deposition.

International Journal of Photoenergy

p-Type Quasi-Mono Silicon Solar Cell Fabricated by Ion Implantation

Table 5