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International Journal of Polymer Science
Volume 2012 (2012), Article ID 937928, 7 pages
http://dx.doi.org/10.1155/2012/937928
Review Article

Development of an Environmentally Friendly Resist-Removal Process Using Wet Ozone

Department of Bioscience and Applied Chemistry, Graduate School of Science and Technology, Kanazawa Institute of Technology, 3-1 Yatsukaho, Hakusan, Ishikawa 924-0838, Japan

Received 12 August 2011; Accepted 15 November 2011

Academic Editor: Eri Yoshida

Copyright © 2012 Hideo Horibe and Yousuke Goto. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

How to Cite this Article

Hideo Horibe and Yousuke Goto, “Development of an Environmentally Friendly Resist-Removal Process Using Wet Ozone,” International Journal of Polymer Science, vol. 2012, Article ID 937928, 7 pages, 2012. doi:10.1155/2012/937928