195325.fig.008a
(a)
195325.fig.008b
(b)
Figure 8: (a) Normalized is plotted as a function of P/E cycle for each TN profile. (b) Normalized after bake at each P/E cycle for each top nitridation profile. is normalized by the maximum value of TN-C, and N% is normalized by maximum concentration of TN-C. TN-0 shown in this figure indicates no TN [77].