High Isolation Single-Pole Four-Throw RF MEMS Switch Based on Series-Shunt Configuration

<table>Top view of SP4T switch is shown. At the output ends capacitive switch membranes are placed in shunt configuration (connected to ground planes). The ohmic switches has two-piece metal contact to connect the signal line. In the lower right region, membranes are made transparent to demonstrate electrodes, dielectric layer, and contact points beneath.</table>

The Scientific World Journal

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Figure 2

Figure 2: High Isolation Single-Pole Four-Throw RF MEMS Switch Based on Series-Shunt Configuration 