High Isolation Single-Pole Four-Throw RF MEMS Switch Based on Series-Shunt Configuration

Figure 5

The force model is applicable on both membranes due to the twin electrodes used to actuate the membrane, 𝑙 is the length of membrane, and 𝜉 is the force applied in downward direction from 𝑥₁ to 𝑥₂ per electrode.