High Isolation Single-Pole Four-Throw RF MEMS Switch Based on Series-Shunt Configuration

<table>Equivalent circuit model of single port of proposed SP4T switch. Due to series-shunt configuration, the <svg height="11.75" id="M92" style="vertical-align:-0.23206pt" version="1.1" viewbox="0 0 32.762501 11.75" width="32.762501" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink">
<g transform="matrix(.017,-0,0,-.017,.062,11.4)"><path d="M682 629q-1 -16 -1.5 -72t-2.5 -86l-31 -4q-5 92 -51 129t-139 37q-100 0 -177 -49t-116 -125t-39 -162q0 -122 66 -201t182 -79q83 0 137 42.5t112 128.5l26 -15q-12 -31 -42.5 -88t-45.5 -75q-139 -27 -199 -27q-148 0 -243 81.5t-95 226.5q0 173 129.5 274.5
t325.5 101.5q114 0 204 -38z" id="x1D436"></path></g><g transform="matrix(.017,-0,0,-.017,12.047,11.4)"><path d="M559 163q-23 -66 -68 -163h-474l6 26q62 4 79.5 19.5t28.5 75.5l78 409q7 35 8.5 49t-8 25t-24 13t-51.5 5l5 28h266l-6 -28q-65 -5 -79.5 -18t-25.5 -74l-76 -406q-10 -57 14 -75q12 -13 96 -13q93 0 126 29q41 40 76 109z" id="x1D43F"></path></g><g transform="matrix(.017,-0,0,-.017,21.753,11.4)"><path d="M627 18l-10 -26q-79 6 -116 27t-69 76q-41 71 -71 138q-13 29 -27.5 39t-42.5 10h-46l-27 -145q-13 -74 -2.5 -88.5t78.5 -20.5l-6 -28h-271l5 28q66 6 82.5 21.5t30.5 87.5l71 387q12 66 2 78.5t-77 19.5l8 28h233q102 0 147 -29q65 -43 65 -129q0 -69 -45.5 -117
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</svg> model of series switch is combined with shunt as given. From left <svg height="15.825" id="M93" style="vertical-align:-3.39066pt" version="1.1" viewbox="0 0 18.7125 15.825" width="18.7125" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink">
<g transform="matrix(.017,-0,0,-.017,.062,11.538)"><path d="M698 636l-541 -596q60 -5 176 -5q91 0 138.5 5t69.5 24q44 36 85 124l29 -15q-38 -125 -64 -173h-559l-9 16l545 598h-182q-81 0 -109 -8t-48 -31q-26 -29 -55 -103l-29 3q23 86 42 200h22q11 -16 21 -20.5t34 -4.5h428z" id="x1D44D"></path></g>
<g transform="matrix(.012,-0,0,-.012,12.313,15.613)"><path d="M241 635q53 0 94 -28.5t63.5 -76t33.5 -102.5t11 -116q0 -58 -11 -112.5t-34 -103.5t-63.5 -78.5t-94.5 -29.5t-95 28t-64.5 75t-34.5 102.5t-11 118.5q0 58 11.5 112.5t34.5 103t64.5 78t95.5 29.5zM238 602q-32 0 -55.5 -25t-35.5 -68t-17.5 -91t-5.5 -105
q0 -76 10 -138.5t37 -107.5t69 -45q32 0 55.5 25t35.5 68.5t17.5 91.5t5.5 105t-5.5 105.5t-18 92t-36 68t-56.5 24.5z" id="x30"></path></g>
</svg> to middle <svg height="15.825" id="M94" style="vertical-align:-3.39066pt" version="1.1" viewbox="0 0 18.7125 15.825" width="18.7125" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink">
<g transform="matrix(.017,-0,0,-.017,.062,11.538)"><path d="M698 636l-541 -596q60 -5 176 -5q91 0 138.5 5t69.5 24q44 36 85 124l29 -15q-38 -125 -64 -173h-559l-9 16l545 598h-182q-81 0 -109 -8t-48 -31q-26 -29 -55 -103l-29 3q23 86 42 200h22q11 -16 21 -20.5t34 -4.5h428z" id="x1D44D"></path></g>
<g transform="matrix(.012,-0,0,-.012,12.313,15.613)"><path d="M241 635q53 0 94 -28.5t63.5 -76t33.5 -102.5t11 -116q0 -58 -11 -112.5t-34 -103.5t-63.5 -78.5t-94.5 -29.5t-95 28t-64.5 75t-34.5 102.5t-11 118.5q0 58 11.5 112.5t34.5 103t64.5 78t95.5 29.5zM238 602q-32 0 -55.5 -25t-35.5 -68t-17.5 -91t-5.5 -105
q0 -76 10 -138.5t37 -107.5t69 -45q32 0 55.5 25t35.5 68.5t17.5 91.5t5.5 105t-5.5 105.5t-18 92t-36 68t-56.5 24.5z" id="x30"></path></g>
</svg> component, the circuit is for ohmic switches and then till the rightmost component <svg height="15.825" id="M95" style="vertical-align:-3.39066pt" version="1.1" viewbox="0 0 18.7125 15.825" width="18.7125" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink">
<g transform="matrix(.017,-0,0,-.017,.062,11.538)"><path d="M698 636l-541 -596q60 -5 176 -5q91 0 138.5 5t69.5 24q44 36 85 124l29 -15q-38 -125 -64 -173h-559l-9 16l545 598h-182q-81 0 -109 -8t-48 -31q-26 -29 -55 -103l-29 3q23 86 42 200h22q11 -16 21 -20.5t34 -4.5h428z" id="x1D44D"></path></g>
<g transform="matrix(.012,-0,0,-.012,12.313,15.613)"><path d="M241 635q53 0 94 -28.5t63.5 -76t33.5 -102.5t11 -116q0 -58 -11 -112.5t-34 -103.5t-63.5 -78.5t-94.5 -29.5t-95 28t-64.5 75t-34.5 102.5t-11 118.5q0 58 11.5 112.5t34.5 103t64.5 78t95.5 29.5zM238 602q-32 0 -55.5 -25t-35.5 -68t-17.5 -91t-5.5 -105
q0 -76 10 -138.5t37 -107.5t69 -45q32 0 55.5 25t35.5 68.5t17.5 91.5t5.5 105t-5.5 105.5t-18 92t-36 68t-56.5 24.5z" id="x30"></path></g>
</svg>, the circuit is applicable for capacitive switches with variable <svg height="11.75" id="M96" style="vertical-align:-0.23206pt" version="1.1" viewbox="0 0 12.1125 11.75" width="12.1125" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink">
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t325.5 101.5q114 0 204 -38z" id="x1D436"></path></g>
</svg>.</table>

The Scientific World Journal

fig7

Figure 7

Figure 7: High Isolation Single-Pole Four-Throw RF MEMS Switch Based on Series-Shunt Configuration 