High Isolation Single-Pole Four-Throw RF MEMS Switch Based on Series-Shunt Configuration

Table 1

Switch specifications.

Component	Length; 𝜇m	Width; 𝜇m	Depth; 𝜇m	Material
Substrate	1000	1060	500	Silicon
Substrate dielectric	1000	1060	0.5	HfO2
CPW (G S G) (A)	14	20	14	Gold
CPW (G S G) (B)	28	40	28	Gold