Research Article
High Isolation Single-Pole Four-Throw RF MEMS Switch Based on Series-Shunt Configuration
Table 1
Switch specifications.
| Component | Length m | Width m | Depth m | Material |
| Substrate | | | | Silicon | Substrate dielectric | | | | HfO2 | CPW (G S G) (A) | | | | Gold | CPW (G S G) (B) | | | | Gold |
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