Research Article
High Isolation Single-Pole Four-Throw RF MEMS Switch Based on Series-Shunt Configuration
Table 2
Dimensions of ohmic RF MEMS switches.
| Parameter | Dimensions | Material |
| Contact switch | m2 | Gold | Pull-down electrode × 2 | m2 | Gold | Gap height, | 2 m | — | Hole diameter | 3 m | — | Contact metal × 2 | m2 | Gold | Anchors | m2 | Gold |
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