High Isolation Single-Pole Four-Throw RF MEMS Switch Based on Series-Shunt Configuration

Table 2

Dimensions of ohmic RF MEMS switches.

Parameter	Dimensions	Material
Contact switch	316×120 𝜇m^2	Gold
Pull-down electrode × 2	50×120 𝜇m^2	Gold
Gap height, 𝑔0	2 𝜇m	—
Hole diameter	3 𝜇m	—
Contact metal × 2	15×80 𝜇m^2	Gold
Anchors	10×120 𝜇m^2	Gold