Research Article
High Isolation Single-Pole Four-Throw RF MEMS Switch Based on Series-Shunt Configuration
Table 3
Dimensions of capacitive RF MEMS switches.
| | Parameter | Dimensions | Material |
| | Contact switch | m2 | Gold | | Pull-down electrode × 2 | m2 | Gold | | Gap height, | 3 m | — | | Hole diameter | 3 m | — | | Dielectric area | m2 | HfO2 | | Dielectric thickness | 0.15 m | Gold |
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