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Advances in Materials Science and Engineering
Volume 2013 (2013), Article ID 898565, 13 pages
http://dx.doi.org/10.1155/2013/898565
Research Article

Characterization of Metal Oxide-Based Gas Nanosensors and Microsensors Fabricated via Local Anodic Oxidation Using Atomic Force Microscopy

1Divisão de Metrologia de Materiais, Instituto Nacional de Metrologia (INMETRO), Qualidade e Tecnologia, 25250-020 Duque de Caxias, RJ, Brazil
2Laboratório Nacional de Luz Síncrotron, Caixa Postal 6192, 13083-970 Campinas, SP, Brazil
3Departamento de Física, Universidade Federal de Minas Gerais, 30123-970 Belo Horizonte, MG, Brazil
4Instituto de Física, PPGMicro, Universidade Federal do Rio Grande do Sul, 91501-970 Porto Alegre, RS, Brazil

Received 27 May 2013; Accepted 13 August 2013

Academic Editor: Bin Zhang

Copyright © 2013 Bráulio S. Archanjo et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

How to Cite this Article

Bráulio S. Archanjo, Pablo F. Siles, Camilla K. B. Q. M. Oliveira, Daniel L. Baptista, and Bernardo R. A. Neves, “Characterization of Metal Oxide-Based Gas Nanosensors and Microsensors Fabricated via Local Anodic Oxidation Using Atomic Force Microscopy,” Advances in Materials Science and Engineering, vol. 2013, Article ID 898565, 13 pages, 2013. doi:10.1155/2013/898565