Review Article

Inductively Coupled Plasma Sources and Applications

Figure 25

Contour plot of electron density and electron temperature: (a) both in a horizontal section above the lower electrode; (b) and (c) show electron density and electron temperature in a vertical section passing through the center of the lower electrode.
164249.fig.0025a
(a)
164249.fig.0025b
(b)
164249.fig.0025c
(c)