International Journal of Microwave Science and Technology

Research Article

A New Process for On-Chip Inductors with High Q-Factor Performance

Table 2

Measurement results for inductors of three different sizes, benchmarking the under-etching effect and the losses considering the standard devices with and without pillars provided.
GeometryElectrical Results
No.Name
( m)( m)( m)( m) (GHz)(nH)(Ω)(GHz)
11.5 nH underetched2133182.49514.95.21.511.08>20
1.5 nH standard no pillar2133182.49510.32.91.491.03>20
1.5 nH standard inc. pillar2133182.4959.42.61.531.01>20
22.2 nH underetched2133112.413719.06.52.171.88>20
2.2 nH standard no pillar2133112.413710.53.02.181.85>20
2.2 nH standard inc. pillar2133112.41379.42.52.221.83>20
36.8 nH underetched213672.410513.03.56.745.649.3
6.8 nH standard no pillar213672.41058.22.26.715.597.9
6.8 nH standard inc. pillar213672.41057.81.76.835.527.4