Applications of Compact Laser-Driven EUV/XUV Plasma Sources
Figure 10
Material studies. (a): Reflectograms of different oxidation states of Si in SiO (black) and SiO2 (red). (b): Comparison between plasma-treated (red) and untreated (black) Polyimide foils. In spite of the small penetration depth of the plasma treatment a difference in refractive index is measurable.
