Applications of Compact Laser-Driven EUV/XUV Plasma Sources

<table>NEXAFS spectrum at the carbon K-edge of a Polyimide film (<span class="svg-td" style="width: 66.212502px;"><svg height="9.7875004" id="M34" style="vertical-align:-0.1575pt" version="1.1" viewbox="0 0 66.212502 9.7875004" width="66.212502" xmlns="http://www.w3.org/2000/svg">
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<tspan style="font-size: 11.21px; " x="0" y="0">𝑑</tspan>
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<tspan style="font-size: 11.21px; " x="19.860577" y="0">2</tspan>
<tspan style="font-size: 11.21px; " x="25.464577" y="0">0</tspan>
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</svg></span>) measured in transmission (average over 60 pulses). The data shows a deviation of less than 0.4 eV from corresponding synchrotron data.</table>

X-Ray Optics and Instrumentation

Applications of Compact Laser-Driven EUV/XUV Plasma Sources

Figure 12