Applications of Compact Laser-Driven EUV/XUV Plasma Sources

<table>Ablation rates of various polymers, depending on the EUV energy density (a). (b) picture shows the AFM image of PMMA, irradiated with 1 EUV pulse at 1.3 J/c<span class="svg-td" style="width: 16.549999px;"><svg height="12.3625" id="M7" style="vertical-align:-0.0pt" version="1.1" viewbox="0 0 16.549999 12.3625" width="16.549999" xmlns="http://www.w3.org/2000/svg">
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X-Ray Optics and Instrumentation

Applications of Compact Laser-Driven EUV/XUV Plasma Sources

Figure 3